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Model 2002 page 27
Model 2002
Dual Sensor Vacuum Gauge
1.0E-05
1.0E-04
1.0E-03
1.0E-02
1.0E-01
1.0E+00
1.0E+01
1.0E+02
1.0E+03
1.0E-05 1 .0E-04 1.0E-03 1 .0E-02 1.0E-01 1.0E+00 1.0E+01 1.0E+02 1.0E+0 3
Pressure (Torr)
Zeroed Sensor Output (Arbitrary Units)
Pirani
Piezo
Figure 5.4